How to Select the Right Solenoid Valves for Semiconductor Manufacturing Equipment: Technical Parameters and Solutions

How to Select the Right Solenoid Valves for Semiconductor Manufacturing Equipment: Technical Parameters and Solutions

In semiconductor manufacturing equipment, solenoid valves are the core components of pneumatic control. Their performance directly impacts the equipment's precision, stability, and production efficiency. Due to the strict requirements for cleanliness, reliability, and control accuracy in the semiconductor fabrication environment, general-purpose solenoid valves are often inadequate. Therefore, choosing specialized solenoid valves that meet industry-specific characteristics is crucial.

 

Special Requirements for Solenoid Valves in the Semiconductor Industry

 

Solenoid valves used in semiconductor manufacturing equipment must meet several key characteristics:

  1. High Cleanliness: The semiconductor manufacturing environment is extremely sensitive to particle contamination. Solenoid valves must not generate microparticles during operation, and their internal structure and materials must comply with cleanroom standards.

  2. High Reliability and Long Lifespan: Production lines often operate 24/7 without interruption, as any downtime can lead to significant financial losses. Solenoid valves must have extremely high reliability and an exceptionally long service life.

  3. Fast Response: In precision control applications such as wafer transfer and gas distribution, the solenoid valve's response speed directly affects the equipment's cycle time and control accuracy.

  4. Corrosion Resistance: Some processes involve corrosive gases (e.g., HF, Cl2). The valve's materials must have excellent corrosion resistance.

  5. Low Power Consumption and Low Heat Generation: In highly integrated equipment, solenoid valves need to have low power consumption to reduce heat generation, preventing adverse effects on surrounding precision components.

 

Solenoid Valve Solutions for Semiconductor Equipment

 

To address these stringent requirements, here are some commonly used solenoid valve series and technical solutions from brands like Airtac in the semiconductor industry:

 

1. Miniature Solenoid Valve Series (e.g., Airtac 4V010 Series)

 

For applications requiring compact installation space and precise control, miniature solenoid valves are the ideal choice. They are often used to control small cylinders or as part of a pneumatic valve manifold.

Technical Parameters and Features:

  • Model: 4V010 series

  • Valve Type: 5-port 2-position

  • Port Size: M5

  • Cv Value: 0.04

  • Operating Pressure: 0.15~0.8 MPa

  • Response Time: Approximately 15ms

  • Features: Compact, fast response, can be integrated into tight spaces. Suitable for end-effectors in wafer handling equipment, vacuum chuck control, etc.

 

2. Vacuum Solenoid Valve Series (e.g., Airtac V-V Series)

 

In semiconductor equipment, control in a vacuum environment is critical. These solenoid valves are specifically designed for vacuum applications, effectively controlling vacuum suction and release to ensure stable gripping and placement of fragile components like wafers.

Technical Parameters and Features:

  • Model: V-V series

  • Valve Type: 2-way 3-port, 2-way 5-port

  • Port Size: M5, 1/8"

  • Operating Pressure: Vacuum to -0.7MPa

  • Leak Rate: Extremely low, less than 1E-6 Pa·m³/s

  • Features: Excellent sealing performance and extremely low internal leakage. Can be used for vacuum fixtures and vacuum chuck control in semiconductor manufacturing.

 

3. Cleanroom-Specific Solenoid Valve Series (e.g., SMC VQC Series, CKD PSHB Series)

 

These solenoid valves are specially designed for cleanroom environments. Both their materials and structure are optimized to prevent particle generation and the intrusion of external contaminants.

Technical Parameters and Features:

  • Valve Body Material: Specially treated aluminum alloy or engineering plastics.

  • Seal Material: Uses low-outgassing fluororubber or special polymers.

  • Internal Structure: Adopts a grease-free design to reduce particle generation.

  • Features: High cleanliness, meeting ISO Class 3 or higher cleanroom requirements. Commonly used in critical applications like gas distribution and pure air control.

 

4. High-Flow and Large-Port Solenoid Valve Series (e.g., Airtac 4V210, 4V310 Series)

 

In large pneumatic systems that require rapid inflation or deflation, such as chamber handling and large cylinder control, high-flow solenoid valves are necessary.

Technical Parameters and Features:

  • Model: 4V210, 4V310 series

  • Port Size: 1/4", 3/8"

  • Cv Value: 0.67 - 1.67

  • Operating Pressure: 0.15~0.8 MPa

  • Features: High flow rate and fast response, capable of meeting the pneumatic control needs of high-throughput production lines.

 

Selection and Application Advice

 

  1. Define the Application Requirements: First, determine the specific application: Is it for a vacuum fixture, gas distribution, or large cylinder control? This will dictate the required valve type (2-way, 3-way, 5-way) and flow rate.

  2. Consider Environmental Factors: If the operating environment is a vacuum or a cleanroom, you must choose a vacuum valve or a cleanroom-specific solenoid valve. For corrosive gases, a special valve made of fully fluorinated or stainless steel material is required.

  3. Match Electrical Parameters: Confirm the equipment's control voltage (e.g., DC24V) and select the corresponding solenoid valve. Also, consider power consumption and heat dissipation.

  4. Integration and Installation: For complex control systems, consider using integrated valve manifolds to simplify wiring and installation, saving space.

 

Conclusion

 

In semiconductor manufacturing equipment, choosing a solenoid valve is not a one-size-fits-all process. For different process steps, you need to comprehensively consider multiple dimensions, including cleanliness, reliability, response speed, corrosion resistance, and flow rate. Selecting a specialized solenoid valve that aligns with your specific application is key to ensuring the stable and efficient operation of semiconductor manufacturing equipment.

If you are looking for suitable solenoid valves for your semiconductor equipment project, it is recommended to contact a professional pneumatic component supplier for more detailed technical support and customized solutions.

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